LVC414 ASM Liquid Vapor Vaporizer Controller LVC 414

Product Details

Electronic Vaporizer controller LVC-414 has been designed to accurately measure and control

the mass flow rate (grams/min) of doping materials by varying the flow of carrier gas through a

bubbler containing the source material.

Source materials include SiCl4, SiHCl3, POCl13, GeCl4 and BBr3. Other doping material can

also be controlled, provided that they vaporize with adequate concentration for accurate

ratiodetection. Carrier gases include H2, He, N2, O2 and Ar.

Three outputs are provided :

Source (0 to +5VDC).

Carrier (0 to +5VDC)

Ratio (0 to +5VDC).

These outputs can be monitored with any 5 volt D.C. voltmeter with a sensitivity of 1000

ohms/volt or more. A built-in valve varies the carrier mass flow rate to control the source

gram/min. selected by an external control voltage.

A single small package contains the flowmeter section, ratio detector, control valve and the

electronics

SPECIFICATIONS

MINIMUM CARRIER GAS FLOW: 5% of maximum

MAXIMUM SOURCE FLOW: Up to 40 grams/min. full scale

OPERATING PRESSURE RANGE: 10-40 psi differential

MAXIMUM GAS PRESSURE: 60 psig

GAS AND AMBIENT TEMPERATURE RANGE: 60-90°F (15-35°C) up to 43°C on special request

RESPONSE: 10 seconds to within 4% of setpoint

CARRIER GASES: Hydrogen, Helium, Nitrogen, Oxygen or Argon, , Mixed gas

REPEATABILITY: ± 0.5% of full scale

PRESSURE SENSIBILITY: ± 0.25% of full scale for pressures from 10 to 40 psid

ACCURACY AND LINEARITY: ± 4.0% of full scale over entire operating range

COMMAND SETTING: 0.1 to 5 vdc

OUTPUT INDICATION:

1. SOURCE: 0.1-5 vdc linearly proportional to mass flow rate of vaporized liquid

2. CARRIER: 0.1-5 vdc linearly proportional to mass flow rate of carrier gas

3. RATIO: 0.1-5 vdc linearly proportional to ratio of vapor flow (SCCM) to carrier flow

(SCCM) scaled with 5 vdc = 50%

OUTPUT IMPEDANCE:10 ohms maximum

RIPPLE: 50 mv p-p maximum

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