627B-15789 627B15789 MKS pressure transducer

Product Details

Features

Sensor operating temperature of 150°C & 160°C

All-Inconel capacitance sensor

High 45 psia overpressure rating for improved stability and repeatability

Compact design fits small spaces

Internally-mounted solid state process relays for external control

Long-term performance in nitride CVD & metal etch

Specifications

Type: Pressure Transducer

Sensor Type: Capacitance Manometer

Measurement Type: Absolute

Full Scale Pressure Ranges: 1, 2, 3, 5, 10, 20, 100, 1000 Torr

Full Scale Range: 0.01% of Full Scale

Sensor Temperature: Controlled to 150°C or 160°C

Accuracy: 0.25% of Reading

Communication Protocol: EtherCAT®

Analog Output: 0 to 10 VDC into >10 ohm load

Analog Connector: 15-pin D-subminiture

Trip Relays: Two internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range

Zero Temperature Coefficient: 150°C Versions: 0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range) 160°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)

Span Temperature Coefficient: 0.02% Reading/°C

Response Time: 50 msec

Warm-up Time: 4 hours

Internal Volume: 6.3 cc

Ambient Operating Temperature: 15° to 50°C

Overpressure Limit: 45 psia

Power Requirements: +24 VDC or ±15 VDC, 1 amp at start up

About MKS

Our Technology Enables The Future MKS Instruments partners with customers in the environmental monitoring, defense & security, life sciences & research, process & industrial manufacturing, and thin film industries to develop ground-breaking solutions to their toughest technology challenges.

Our work enables our customers to be more successful, and our societies to be safer and more productive.

MKS Instruments, Inc is the worldwide leader in technology solutions for the markets we serve. We make the instruments, subsystems and process control solutions that enable our customers to measure, control, power, monitor and analyze the critical parameters of the advanced processes that they manage.

The chances are high that you own or have consumed a product that has been made possible by our technology.

Our people are world-class problem-solvers, operating at the leading edge of science, engineering and technology. We have a proud history of industry-changing innovation and we back it up with a global support infrastructure that ensures we are there for you throughout the life cycle of our solutions.

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