1579A00412LM1BV MKS MASS FLOW CONTROLLER

Product Details

Specifications

Front Panel Controls: Power on-off switch, setup and operational commands can be accessed via the keypad

Units:

Pressure:Torr, mbar, Pascal

Flow: sccm and slm

Power Requirements: 100 - 240 VAC 50/60 Hz 150 W maximum

Analog Output: Buffered, log linear and linear output for each channel and log linear for combined channels

Set Point Contact Rating: 2 amps @ 30 VAC

Set Point Configuration: Twelve pressure dependent SPST set point relays

Operating Temperature: 5° to 40°C (41° to 104°F)

Storage Temperature: 10° to 55°C (50° to 131°F)

Mounting: 1/2 rack, 2U High, 13 inches deep

About MKS

Our Technology Enables The Future MKS Instruments partners with customers in the environmental monitoring, defense & security, life sciences & research, process & industrial manufacturing, and thin film industries to develop ground-breaking solutions to their toughest technology challenges.

Our work enables our customers to be more successful, and our societies to be safer and more productive.

MKS Instruments, Inc is the worldwide leader in technology solutions for the markets we serve. We make the instruments, subsystems and process control solutions that enable our customers to measure, control, power, monitor and analyze the critical parameters of the advanced processes that they manage.

The chances are high that you own or have consumed a product that has been made possible by our technology.

Our people are world-class problem-solvers, operating at the leading edge of science, engineering and technology. We have a proud history of industry-changing innovation and we back it up with a global support infrastructure that ensures we are there for you throughout the life cycle of our solutions.

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