839-800327-315 839800327315 LAM Clean Copper Kit Etch

Product Details

Etch technology is required in all integrated circuit (IC) production to help shape a chip’s intricate features. For microelectromechanical systems (MEMS) manufacturing processes, it is used to carve out the widely varying features that form physical structures such as large cavities and high aspect ratio (HAR) deep trenches.

Lam’s DSiE product family delivers exceptional process control at high productivity for several critical and non-critical deep silicon etch applications, including MEMS, power devices, passive components, sensors, and transducers.

High etch rates and productivity with flexibility to use both Bosch and steady-state processes
Tunable depth uniformity delivered through gas flow ratio and transformer coupled capacitive tuning capabilities
Advanced control for improved symmetry and tilt minimization
Tunable CD enabled through fast gas switching

LAM News

LAM RESEARCH CORPORATION ANNOUNCES PARTICIPATION AT UPCOMING CONFERENCE

A live webcast of the presentation will be available to the public and can be accessed from the Investors’ section of Lam’s website at www.lamresearch.com. A replay of the webcast will be available for two weeks after the presentation date.

About Lam Research:
Lam Research Corporation is a global supplier of innovative wafer fabrication equipment and services to the semiconductor industry. As a trusted, collaborative partner to the world’s leading semiconductor companies, we combine superior systems engineering capability, technology leadership, and unwavering commitment to customer success to accelerate innovation through enhanced device performance. In fact, today, nearly every advanced chip is built with Lam technology. Lam Research (Nasdaq: LRCX) is a FORTUNE 500® company headquartered in Fremont, Calif., with operations around the globe.

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