Clean Robots

• Semiconductor and Electronics
• HIGH-PERFORMANCE SPECIALIZED HANDLING ROBOTS
• Kawasaki offers a full line of industry-leading semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1. Speed, accuracy, and reach make these robots ideal for handling delicate semiconductor wafers, LCD panels, organic EL, and solar panels.
• Clean Robots:
• Click on a series below to learn more. Note: images not shown to scale.

CE CNC 0.1mm - 1.6mm Robot welding cutting machine for Acrylic Crytal

NT Series

• Long Reach Design
• Independent axis drive
• 300 & 450 mm wafers
• NT Series

NS Series

• Classic Cylindrical Design
• RTZ motion actuation
• 300 mm wafers
• NS Series

NX Series

• Next-Generation NS Design
• Independent axis drive
• 300 mm wafers
• NX Series

NV Series

• Vacuum Environment Arm
• Compact and lightweight
• Minimizes vibration
• NV Series

TT Series

• Telescopic Base Design
• Large vertical reach
• Long reach NT Manipulator
• TT Series

TX Series

• Telescopic Base Design
• Large vertical reach
• Medium reach NX manipulator
• TX Series

DOWNLOAD
Kawasaki Clean robots brochure

WIDE WORKING RANGE

The next-generation designs of clean robots feature an independent drive on all axes, which significantly increases the usable work area with minimal dead-space and greater flexibility. The TT and TX series are designed with telescopic bases for applications requiring large vertical reach.

HANDLING OPTIONS AVAILABLE

A wide variety of handling options are available across the clean robot series. Both 300 mm and next-generation 450 mm wafer handling robots are available, along with dual-gripping technology that allows a single robot base to handle two wafers. Models are also available with an additional axis for handling wafers at both horizontal and vertical angles.

CLEANROOM SPECIFICATION

Strict design and assembly standards allow this series of arms to conform with a range of ISO cleanroom standards, as well as adhering to the SEMI F47 and SEMI S2 standards for voltage and safety requirements.

PROGRAMMING FLEXIBILITY

Clean series robot controllers offer superior programming flexibility with manual, semi-automatic, and full-automatic teaching methods. Ethernet communication port as a standard enables a high level of communication with various equipment in a facility.