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150mm Rapid Thermal Annealing System With Three Sets Process Gases
150mm Rapid Thermal Annealing System With Three Sets Process Gases
Specifications
Brand Name :
GaNova
Model Number :
JDEQ-0002
Place of Origin :
Suzhou China
MOQ :
1
Payment Terms :
T/T
Delivery Time :
8-10week days
Product Name :
Rapid Thermal Annealing System
Model :
RTP-150RL
Maximum sample size :
150mm
Process gases :
three sets
Software control system :
RL900
temperature control :
Tube power PID
Description

RTP-150RL Rapid Thermal Annealing System with Three Sets Process Gases

RTP-150RL:
Is in the protection atmosphere of the desktop manual rapid annealing system, with infrared visible light heating single piece Wafer or sample, short process time, high temperature control precision, suitable for 2-6 inch wafer.Its unique cavity design, advanced temperature control technology and a unique RL900 software control system over conventional diffusion furnace annealing systems ensures excellent thermal uniformity compared with other RTP systems.

Product characteristics:

1. Infrared halogen lamp tube heating, cooling using air cooling.

2. Tube power PID temperature control, can accurately control the temperature heating, to ensure good reproducibility and temperature uniformity.

3. Parallel air intake method is adopted, and the inlet of gas is set on the Wafer surface to avoid cold points during the annealing process and ensure good temperature uniformity of the product.

4. Air and vacuum treatment methods can be selected, before the intake air gas purification treatment.

5. Standard with three sets of process gases.

6. The maximum size of a measurable single wafer sample is 6 inches (150mm).

7. The triple safety measures of furnace safety temperature opening protection, temperature controller opening authority protection and equipment emergency stop safety protection are adopted to ensure the safety of instruments.

Product tags

heat treatment annealing process

,

two-chambered annealing furnace

,

two chambered annealing furnace
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150mm Rapid Thermal Annealing System With Three Sets Process Gases

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Product Detail
Brand Name :
GaNova
Model Number :
JDEQ-0002
Place of Origin :
Suzhou China
MOQ :
1
Payment Terms :
T/T
Delivery Time :
8-10week days
Contact Supplier
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150mm Rapid Thermal Annealing System With Three Sets Process Gases

Shanghai GaNova Electronic Information Co., Ltd.

Verified Supplier
3 Years
shanghai, shanghai
Since 2020
Business Type :
Manufacturer
Main Products :
GaN Epitaxial Wafer, SiC Epitaxial Wafer, GaAs Epi Wafer
Employee Number :
>100
Certification Level :
Verified Supplier
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