Semi-insulating SiC on Si Compound Wafer , Si wafer, Silicon Wafer, Compound Wafer, SiC on Si Compound Substrate, Silicon Carbide Substrate, P Grade, D Grade, 4inch, 6inch, 4H-SEMI
About Compound wafer
More of Compound wafer
Semi-insulating SiC on Si Compound Wafer is a high-performance advanced semiconductor material.
It has the advantages of both silicon substrate and semi-insulating silicon carbide substrate.
It has excellent thermal conductivity and outstanding high mechanical strength.
It can significantly reduce low leakage current under high temperature and high-frequency conditions and effectively improve device performance.
It is an excellent semiconductor material.
It is usually used in power electronics, radio frequency, and optoelectronic devices, especially in high-demand applications requiring excellent heat dissipation and electrical stability.
Although its production cost is relatively high compared to silicon wafers and silicon carbide wafers, it has attracted more and more attention and favour in high-performance technology due to its advantages in improving device efficiency and stability reliability.
Therefore, semi-insulating SiC on Si composite wafers has broad development prospects in future high-end technology applications.
Details of Compound wafer
Item | Specification |
Diameter | 150 ± 0.2 mm |
SiC Polytype | 4H |
SiC Resistivity | ≥1E8 Ω·cm |
Transfer SiC layer Thickness | ≥0.1 μm |
Void | ≤5 ea/wafer (2 mm > D > 0.5 mm) |
Front roughness | Ra ≤ 0.2 nm (5 μm × 5 μm) |
Si Orientation | <111>/<100>/<110> |
Si Type | P/N |
Flat/Notch | Flat/Notch |
Edge Chip, Scratch, Crack (visual inspection) | None |
TTV | ≤5 μm |
Thickness | 500/625/675 ± 25 μm |
Other pictures of Compound wafer
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FAQ
1. Q: What is the common surface orientation of SiC on Si wafers?
A: The common orientation is (111) for SiC, aligned with the silicon substrate.
2. Q: Are there specific annealing requirements for SiC on Si wafers?
A: Yes, high-temperature annealing is often required to improve material properties and reduce defects.