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High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
Specifications
Brand Name :
ZMSH
Model Number :
Silicon carbide ceramic chuck
Certification :
rohs
Place of Origin :
CHINA
Price :
by case
Payment Terms :
T/T
Item: :
Silicon carbide ceramic chuck
Thermal Stability: :
High Temperature Stability
Type: :
Ceramic Plate
Max Use: :
1800 ºC
Tolerance: :
±0.001 mm or Custom
Size: :
Customized
Specification: :
Customize
Usage: :
Photoelectric Lighting, Semiconductor
Description

High precision SIC silicon carbide ceramic chuck ceramic element vacuum sucker customization

High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

Product summary

Silicon carbide ceramic chuck/tray is a high-performance fixture used in semiconductor, LED, photovoltaic and other precision manufacturing fields, mainly used to fix and carry wafers, sapphire substrates, silicon wafers and other materials. Its core material is silicon carbide (SiC), which is made by precision machining, has excellent physical and chemical properties, and can meet the processing needs of high precision and high stability.


Product Parameter

(Material property) (Unit) (ssic)
(SiC content) (Wt)% >99
(Average grain size) micron 4-10
(Density) kg/dm3 >3.14
(Apparent porosity) Vo1% <0.5
(Vickers hardness) HV 0.5 GPa 28
*()
Flexural strength* (three points)		 20ºC MPa 450
(Compressive strength) 20ºC MPa 3900
(Elastic Modulus) 20ºC GPa 420
(Fracture toughness) MPa/m'% 3.5
(Thermal conductivity) 20°ºC W/(m*K) 160
(Resistivity) 20°ºC Ohm.cm 106-108

(Thermal expansion coefficient)		 a(RT**...80ºC) K-1*10-6 4.3

(Maximum operating temperature)		 oºC 1700

High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

Product feature

1.Ultra-high hardness and wear resistance: silicon carbide hardness close to diamond, excellent wear resistance, can withstand long-term high strength processing, significantly extend the service life.

2. Excellent thermal management performance: high thermal conductivity and low thermal expansion coefficient to ensure rapid heat dissipation in high temperature environments and maintain dimensional stability to avoid deformation caused by thermal stress.

3. Excellent chemical stability: strong corrosion resistance, able to withstand acids, alkalis and a variety of chemical solvents, suitable for harsh process environment.

4. High flatness and surface finish: After precision machining, the surface flatness is up to micron level, ensuring high precision and low pollution during processing.

High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

Product application

In semiconductor manufacturing, silicon carbide ceramic chuck can be used for wafer cutting, polishing, lithography and other key processes to ensure high precision processing. As a bearing platform for sapphire substrate processing in LED production, it supports cutting, grinding and epitaxial growth.

In addition, silicon carbide ceramic chucks are used as trays in high temperature equipment such as CVD and PVD, using high temperature processes to withstand extreme environments and maintain stability. In the photovoltaic industry, it is used for silicon wafer cutting and thin film solar cell manufacturing to improve processing efficiency and yield.


Product display


High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker CustomizationHigh Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

Product Q&A

1.Q: What is silicon carbide ceramic chuck?
A: Silicon carbide ceramic chucks are a high-performance fixture for semiconductor, LED and photovoltaic manufacturing, mainly used to hold and carry wafers, sapphire substrates and other materials, with high hardness, high thermal conductivity and excellent chemical stability.

2.Q: What are the main advantages of silicon carbide ceramic chuck?
A: The main advantages of silicon carbide ceramic chucks include high wear resistance, excellent thermal management performance, high flatness and corrosion resistance, which can meet the needs of high-precision machining and high-temperature processes.



Tag: #SIC, #silicon carbide ceramic chuck, #ceramic element, #vacuum sucker customization, #High precision

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High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

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Product Detail
Brand Name :
ZMSH
Model Number :
Silicon carbide ceramic chuck
Certification :
rohs
Place of Origin :
CHINA
Price :
by case
Payment Terms :
T/T
Contact Supplier
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization
High Precision SIC Silicon Carbide Ceramic Chuck Ceramic Element Vacuum Sucker Customization

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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