Epi-Ready 6H N Type SiC Wafer, Production Grade,Double Side Polished 10mm x 10mm
PAM-XIAMEN provides high quality single crystal SiC (Silicon Carbide)wafer for electronic and optoelectronic industry. SiC wafer is a next generation semiconductor materialwith unique electrical properties and excellent thermal properties for high temperature and high power device application. SiC wafer can be supplied in diameter 2~6 inch, both 4H and 6H SiC , N-type , Nitrogen doped , and semi-insulating type available.
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SILICON CARBIDE MATERIAL PROPERTIES
Polytype | Single Crystal 4H | Single Crystal 6H |
Lattice Parameters | a=3.076 Å | a=3.073 Å |
c=10.053 Å | c=15.117 Å | |
Stacking Sequence | ABCB | ABCACB |
Band-gap | 3.26 eV | 3.03 eV |
Density | 3.21 · 103 kg/m3 | 3.21 · 103 kg/m3 |
Therm. Expansion Coefficient | 4-5×10-6/K | 4-5×10-6/K |
Refraction Index | no = 2.719 | no = 2.707 |
ne = 2.777 | ne = 2.755 | |
Dielectric Constant | 9.6 | 9.66 |
Thermal Conductivity | 490 W/mK | 490 W/mK |
Break-Down Electrical Field | 2-4 · 108 V/m | 2-4 · 108 V/m |
Saturation Drift Velocity | 2.0 · 105 m/s | 2.0 · 105 m/s |
Electron Mobility | 800 cm2/V·S | 400 cm2/V·S |
hole Mobility | 115 cm2/V·S | 90 cm2/V·S |
Mohs Hardness | ~9 | ~9 |
6H N Type SiC Wafer, Production Grade,10mm x 10mm
SUBSTRATE PROPERTY | S6H-51-N-PWAM-330 S6H-51-N-PWAM-430 | |
Description | Production Grade 6H SiC Substrate | |
Polytype | 6H | |
Diameter | (50.8 ± 0.38) mm | |
Thickness | (250 ± 25) μm (330 ± 25) μm (430 ± 25) μm | |
Carrier Type | n-type | |
Dopant | Nitrogen | |
Resistivity (RT) | 0.012 – 0.0028 Ω·cm | |
Surface Roughness | < 0.5 nm (Si-face CMP Epi-ready); <1 nm (C- face Optical polish) | |
FWHM | <30 arcsec <50 arcsec | |
Micropipe Density | A+≤1cm-2 A≤10cm-2 B≤30cm-2 C≤50cm-2 D≤100cm-2 | |
Surface Orientation | ||
On axis | <0001>± 0.5° | |
Off axis | 4°or 8° toward <11-20>± 0.5° | |
Primary flat orientation | Parallel {1-100} ± 5° | |
Primary flat length | 16.00 ± 1.70) mm | |
Secondary flat orientation | Si-face:90° cw. from orientation flat ± 5° | |
C-face:90° ccw. from orientation flat ± 5° | ||
Secondary flat length | 8.00 ± 1.70 mm | |
Surface Finish | Single or double face polished | |
Packaging | Single wafer box or multi wafer box | |
Usable area | ≥ 90 % | |
Edge exclusion | 1 mm |
SiC crystal application
Many researchers know the general SiCapplication:III-V Nitride Deposition;OptoelectronicDevices;High Power Devices;High Temperature Devices;High Frequency Power Devices.But few people knows detail applications, We list some detail application and make some explanations.
Because of SiC physical and electronic properties,silicon carbide based device are well suitable for short wavelength optoelectronic, high temperature, radiation resistant, and high-power/high-frequency electronic devices,compared with Si and GaAs based device.
Many researchers know the general SiC application:III-V Nitride Deposition;Optoelectronic Devices;High Power Devices;High Temperature Devices;High Frequency Power Devices.But few people knows detail applications, here we list some detail application and make some explanations:
1. SiC substrate for X-ray monochromators:such as,using SiC's large d-spacing of about 15 A;
2. SiC substrate for high voltage devices;
3. SiC substrate for diamond film growth by microwave plasma-enhanced chemical vapor deposition;
4. For silicon carbide p-n diode;
5. SiC substrate for optical window: such as for very short (< 100 fs) and intense (> 100 GW/cm2) laser pulses with a wavelength of 1300 nm. It should have a low absorption coefficient and a low two photon absorption coefficient for 1300 nm.
6. SiC substrate for heat spreader: For example,the Silicon carbide crystal will be capillary bonded on a flat gain chip surface of VECSEL (Laser) to remove the generated pump heat. Therefore, the following properties are important:
1) Semi-insulating type required to prevent free carrier absorption of the laser light;
2) Double side polished are preferred;
3) Surface roughness: < 2nm, so that the surface is enough flat for bonding;
7. SiC substrate for THz system application: Normally it require THz transparency
8. SiC substrate for epitaxial graphene on SiC:Graphene epitaxy on off axis substrate and on axis are both available, surface side on C-face or Si face are both available.
9. SiC substrate for process development loke ginding, dicing and etc
10. SiC substrate for fast photo-electric switch
11. SiC substrate for heat sink: thermal conductivity and thermal expansion are concerned.
12. SiC substrate for laser: optical, surface and stranparence are concerned.
13. SiC substrate for III-V epitaxy, normally off axis substrate are required.
Xiamen Powerway Advanced Material Co.,Limited is an expert in SiC substrate, he can give researchers suggestions in different application
SiC Device Fundamentals
To minimize the development and production costs of SiC electronics, it is important that SiC device fabrication takes advantage of existing silicon and GaAs wafer processing infrastructure as much as possible. As will be discussed in this section, most of the steps necessary to fabricate SiC electronics starting from SiC wafers can be accomplished using somewhat modified commercial silicon electronics processes and fabrication tools.