Low temperature distillation process
Pre-treatment of raw gas: The gas mixture containing argon is first preliminarily treated to remove solid impurities and moisture, etc., so as to prevent these impurities from freezing in the subsequent low-temperature environment, which will affect the operation of the equipment.
Compression and cooling: the gas is compressed after pretreatment to increase the gas pressure, and then the temperature is lowered through the cooling system to make the preliminary liquefaction of the gas mixture.
Low-temperature distillation: the preliminary liquefied gas mixture is sent to the distillation tower, using the different boiling points of argon and other gases (e.g. nitrogen, oxygen, etc.) to carry out gas-liquid equilibrium separation for many times at different temperatures and pressures. In the distillation tower, the distribution of temperature and pressure is the key, through the control of these parameters, so that the argon gas is enriched in a specific tower plate position, and ultimately from the top or bottom of the tower to get high purity argon gas.
Product gas treatment: The obtained high purity argon gas is further processed, such as re-cooling, drying, etc., in order to meet the requirements of different users on the purity and quality of argon gas.
Adsorption process
Impurity adsorption: the mixed gas containing argon is passed into the adsorption tower equipped with adsorbent (such as activated carbon, molecular sieve, etc.). The adsorbent has different adsorption capacity for different gases, and can preferentially adsorb the water, carbon dioxide, oxygen and other impurities, so that argon is initially purified.
Adsorbent regeneration: when the adsorbent adsorption saturation, it is necessary to regenerate it to restore the adsorption capacity. Usually using heating, depressurization and other methods, so that the adsorbed impurities from the adsorbent desorption, discharged from the system.
Depth purification: After preliminary purification of argon by adsorption tower, it may still contain a small amount of impurities, which can be purified by series connection of multiple adsorption towers or by using different types of adsorbents for depth purification to further improve the purity of argon.
Membrane separation process
Membrane filtration: Argon containing gas mixture under the pressure difference, through the membrane module with selective permeability. Different gas molecules due to differences in size, shape and chemical properties, the permeation rate in the membrane is different, thus realizing the separation of argon and other gases. For example, some polymer membranes have higher permeability to argon and lower permeability to other impurity gases, enabling argon to preferentially permeate through the membrane while the impurity gases are retained.
Multi-stage separation: in order to improve the purity and recovery of argon, usually using multi-stage membrane separation process. After a level of membrane separation of argon enriched gas is again sent to the next level of membrane separation device for further separation and purification, through multi-stage separation can gradually improve the purity of argon.
Tail gas treatment: the gas (tail gas) which does not pass through the membrane in the process of membrane separation usually contains a certain amount of argon and other impurities, and the tail gas can be further processed, such as recovering the argon therein or discharging it according to the standard.
Function
Efficient recovery of argon gas: it can recover the argon gas emitted in the industrial production process, avoiding the waste of resources caused by the direct emission of argon gas into the atmosphere, improving the utilization rate of argon gas, and reducing the production cost of enterprises. For example, in the semiconductor manufacturing, metal processing and other industries, a large number of argon as a protective gas, through the recovery and purification skid can be discharged in these processes of waste argon gas recycling and reuse.
Deep purification of gas: can remove oxygen, nitrogen, moisture, carbon dioxide, carbon monoxide and other impurities in argon, so that the purity of argon gas reaches a very high level, to meet the demand for high-purity argon gas in different industries. Such as chemical vapor deposition in semiconductor manufacturing, crystal growth and other processes, the need to use the purity of argon up to 99.999999999% or more, argon recovery and purification of the skid can be through a variety of purification techniques to achieve this requirement.
Automatic control operation: Equipped with intelligent control system, it can realize automatic operation and remote monitoring. It can monitor and adjust the parameters in the recovery and purification process in real time, such as temperature, pressure, flow rate, etc., to ensure the stable operation of the system and improve the production efficiency and safety. The operator can easily set parameters, check the operation status and receive alarm information through the control interface.
Energy-saving and environmental protection function: By recovering argon gas and reusing it, it reduces the need for new argon gas mining and production, which helps to save energy and resources, and is also in line with the concept of environmental protection and reduces the impact on the environment. In addition, some skid blocks are designed with energy-efficient components and optimized processes to reduce energy consumption during operation.
Adaptation to different working conditions: with flexible design and configuration, it can be customized according to the needs of different users and the characteristics of the production process, adapting to a variety of complex industrial environments and gas composition conditions. Whether it is local argon recovery for small enterprises or large-scale argon purification in large-scale industrial production, it can provide corresponding solutions.

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