Vapor deposition furnace:
Can be used to heat and vaporize metal halides, metallic organic compounds, hydrocarbons and other reaction sources under specific pressure to generate solid sediment on the surface of the target material. It is also used for chemical vapor deposition of composite materials with hydrocarbon gas (such as C3H8, etc.) as carbon source, such as C/C composite materials, SiC composite
materials, CVD, CVI processing.