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Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Specifications
Brand Name :
ZG
Model Number :
MS
Certification :
CE
Place of Origin :
CHINA
MOQ :
1 piece
Price :
USD10/piece
Payment Terms :
L/C, D/A, D/P, T/T, Western Union, MoneyGram
Supply Ability :
10000 pieces per month
Delivery Time :
3 working days
Packaging Details :
Strong wooden box for Global shipping
Bulk density :
(fired), Mg/m3:3.1
Color: :
White
Porosity (apparent), % nominal: :
22
Flexural strength :
(ASTM C1161, 3-point), MPa: 170
Thermal expansion coefficient :
200-500C, 10-6/C 7.9 200-1000C, 10-6/C 9.0
Pore size :
0.3 ~ 50um
Description

MICRO POROUS ALUMINA CERAMICS, NANO POROUS CERAMICS,Porous Ceramic Vacuum Chuck Table

Materials:

Alumina Ceramic, Silicon Carbide Ceramic

Product Category:

Porous Ceramic

Porous ceramic itself has numerous pores by the ceramic sintering technology and is used for a vacuum chuck. It can serve as an air flotation platform, widely used in semiconductor, panel, laser process, and non-contact linear slide.

Absorb or float the workpiece by applying positive and negative pressure gas, the workpieces include wafer, glass, PET film, or other thin objects.

Application principle:
The airflow with negative vacuum pressure is set to enter the ceramic, the workpiece can be adsorbed.
The airflow with positive vacuum pressure is set to go out of the ceramic, the part can be blown up or not contact the ceramic.

Materials:
-Porous ceramics are made by alumina and silicon carbide, color includes white, light brown, dark brown, blue-gray
-6″, 8″, 12″ regular size available in round, square, oval shape or irregular shapes and sizes.
-Pore size includes 15um, 30um, 40um, 50um, 100um.
-Custom size is available for us

Characteristics include:

  1. High flatness and parallelism

  2. Compact and uniform microstructure with high strength

  3. Good permeability and uniform adsorption affinity

  4. Long lifetime

  5. Dressing easily

Different types of Vacuum Chuck Table:

  • Thinning Chucks

  • Dicing Chucks

  • Cleaning Chucks

  • Transportation Chucks

  • Printing Chucks

  • Custom is available

Service
New and refurbished porous ceramic chucks for Disco, ADT, K&S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc dicing saws and grinders.

Characteristics Chart

Product number

Density g/cm3

Coefficient of elasticity GPa

Bending strength MPa

Coefficient of thermal expansion ×10-6/K

Coefficient of thermal conductivity W/m・K

Electrical resistance Ω・cm
Alumina A995 3.9 380 450 7.3 30 30
Alumina porous - 2.5 55 50 7.4 - 30
Silicon carbide Standard product 3.1 410 500 4.6 170 170
Silicon carbide porous - 2.1 55 50 4.7 - 26
Product tags

small ceramic kiln

,

kiln refractory brick

,

refractory bricks for lime kilns
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Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table

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Product Detail
Brand Name :
ZG
Model Number :
MS
Certification :
CE
Place of Origin :
CHINA
MOQ :
1 piece
Price :
USD10/piece
Contact Supplier
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Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table
Nano Micro Porous Alumina Ceramics Porous Ceramic Vacuum Chuck Table

HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD

Verified Supplier
5 Years
henan, zhengzhou
Since 2007
Business Type :
Manufacturer, Distributor/Wholesaler, Importer, Exporter
Main Products :
Sic Heating Elements, MoSi2 Heating Elements, Industrial Ceramic Parts
Total Annual :
5000000-8000000
Employee Number :
50~100
Certification Level :
Verified Supplier
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