KYKY-EM8100 high-resolution field emission scanning electron microscope with new electron optical designs such as lens barrel acceleration technology and low-aberration conical objective lens. It achieves sub-nanometer imaging at low voltage, has broad applicability to various materials, and can meet the testing needs of various scientific research and industrial fields.
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel,Focus ion beam remodel,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market.
EM8000 is the first Schottky scanning electron microscopy in China which been launched at 2014, it had received a number of positive comment from the market especially from University customer.
Resolution: SE 0.9nm@30kV;3nm@1kV
Magnification : 1x-3000000x/ Optical Magnification 1x-100x
Electron Gun : Schottky Field Emission Gun
Acceleration Voltage : 0.2kV-30kV
Vacuum System: 1 Sputter Ion Pump, 1 Getter Ion Combined Pump,1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump
Detector Configurations:
• High Vacuum Secondary Electron Detector
• Infrared CCD Camera
• Optical navigation
• Four segmentation retractable Backscatter Detector ※
Sample Stage: Five-axis Automatic Large Sample Stage
• X=150mm
• Y=150mm
• Z=65mm
• T=-10°~ +90°
• R=360°
Anti-collision Alarm Function
Sample Specifications:
Maximum Sample Diameter: Ф320mm
Maximum Sample Height: 90mm
Optional Accessories:
EDS/EBSD/STEM/CL/LoadLock Transition Chamber
Heating Stage / Cooling Stage / Tensile Stage, etc