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-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate
-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate
Specifications
Brand Name :
KYKY
Model Number :
3L-25
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
L/C, T/T
Delivery Time :
4weeks
Packaging Details :
Wooden box for overseas shipment
Flange :
DN100CF
pumping speed :
21L/s Air
Ultimate pressure :
7E-8
Working Voltage :
-5KV
Description

Ion Pump , 3L-25 , DN35CF , 21L/s Air , 6L/s Ar , -5KV , 7E-8Pa

Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.

The sputter-ion pump is main pump of oil less ultra-high vacuum set.

The ion pump works in a closed system which doesn't require continuous working backing pump.

Principle:

Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas.

Triode ion pump is improved for increasing the pumping rate for inert gas; ions of inert gas are subjected to grazing incidence into titanium grid of cathode, then neutralized, and reflected to pump wall and anode for being buried with the titanium film. As inert gas buried in the pump wall will not be released due to positive ion bombardment, the pumping speed for inert gas is increased.

Advantages:

This series of pump has advantages such as cleanness, high vacuum degree, zero noise, zero vibration and convenience in operation.

Applications:

Main applications are the scientific experiment apparatuses in the fields of high-energy particle accelerator, controlled thermonuclear reaction apparatus, electric vacuum device, semiconductor material, electronic microscope and mass spectrometer, and other industrial equipment requiring ultra-high vacuum.

Specifications:

Model 3L-25
Flange DN35CF
Pumping speed(L/S) ( air) 21
Pumping speed (Ar) 6
Start-up pressure (Pa) ≤5×10-4
ultimate pressure (Pa) 7×10-8
(℃)baking temperature 　 ＜200
With magnetic
Without magnetic ＜300
working voltage(KV) -5
electrode unit 1
L*W*H (mm) 222×121×161
(kg) weight 8
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-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate

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Product Detail
Brand Name :
KYKY
Model Number :
3L-25
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
L/C, T/T
Contact Supplier
-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate

KYKY TECHNOLOGY CO., LTD.

Site Member
7 Years
beijing, beijing
Since 1958
Business Type :
Manufacturer
Main Products :
Turbomolecular Pump, Ion Vacuum Pump, Vacuum Gate Valve
Employee Number :
>500
Certification Level :
Site Member
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