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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing
Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing
Specifications
Brand Name :
KYKY
Model Number :
CXF-200/1401E
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
T/T, L/C
Delivery Time :
4weeks
Packaging Details :
Wooden box for overseas shipment
Pumping Speed :
1401L/s
lubrication :
Maglev
Flange :
ISO-F/CF 200
Cooling :
Water
name :
Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing
keyword :
Turbo Molecular Pump
Description

Maglev Pump , CXF-200/1401 , Water cooling , On board

series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51
Product tags

vacuum pressure impregnation equipment

,

vacuum pressure impregnation system

,

digital pressure process controller
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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

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Product Detail
Brand Name :
KYKY
Model Number :
CXF-200/1401E
Certification :
CE
Place of Origin :
China
MOQ :
1
Payment Terms :
T/T, L/C
Contact Supplier
Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

KYKY TECHNOLOGY CO., LTD.

Site Member
7 Years
beijing, beijing
Since 1958
Business Type :
Manufacturer
Main Products :
Turbomolecular Pump, Ion Vacuum Pump, Vacuum Gate Valve
Employee Number :
>500
Certification Level :
Site Member
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