Detailed parameters
Aperture<3 mm
Wavelength 1064nm
Dynamic performance
Tracking error 0.16 ms
Step response time
1% of full scale 0.40 ms
10%of full scale 1.2 ms
Typical speeds5.0 m/s
Weight (without objective) 3 kg
f=254 f-theta lens (174*174) ±40
Common Speci
(all angles are in optical degrees)
Dynamic performance
Repeatability (RMS) < 2 µrad
Offset drift < 30 µrad/K
Gain drift < 80 ppm/K
Long-term drift over 8 hours < 0.3 mrad
Optical performance
Typical scan angle ±0.35 rad
Gain error < 5 mrad
Zero offset < 5 mrad
Nonlinearity < 3.5 mrad / 44°
Power requirements
For XY ±15 V DC, max. 3 A each
For Z ±15 V 3A
Protocol Digital XY2-100