Semiconductor Optoelectronic Industry Plasma Injection moulds surface treatment equipment

1. Product Introduction

This Small vacuum plasma cleaning machine using inductive coupling type working principle, and plays an outstanding role in insulation of microwave tube and parts. It is suitable for handling sensitive products with high cleanliness.It can deal with plastic, biochemical materials, PDMS, glass or metal semiconductor, ceramics, composite materials, polymer and other materials, It has the effect of super clean surface, sterilization, improving wettability change, surface property change and improving binding force on the material surface.

2. Characteristics

• Mainly applicable to small scale production and scientific experiment.
• Small volume, tight structure and easy to operate and maintain.
• German core plasma technology.
• Imported 316 stainless steel material; corrosion resistant.
• Imported needle valve precise flow controlling machine.
• Two-way process reactant gas channel.
• Customization available.

3. Technical Parameters:

4. Equipmemt Composition:

Plasma cleaning machine is composed of reaction chamber (also known as vacuum chamber), vacuum system, discharge system, electrical control system, intake flow control system.

1. The reaction chamber is composed of a vacuum chamber and an electrode, which is a plasma reaction space. The items to be processed are placed in the reaction chamber.
2. The vacuum system consists of a vacuum gauge, a vacuum pump and a vacuum pipe, which is responsible for removing the air in the reaction chamber and maintaining an appropriate vacuum degree during operation.
3. The discharge system provides signal and energy for the reaction chamber to excite the reaction gas ionization in the reaction chamber to form the plasma needed.
4. The function of the electronic control system is to control the action process of the equipment according to the optimal process parameters and steps, and maintain the stability of the process parameters
5. Intake flow control system is mainly composed of flow meter and solenoid valve, its role is to accurately control the reaction gas intake flow, and maintain the necessary vacuum degree during the operation.

5. Equipment Operation

1) Open the vacuum chamber door, put the items to be processed into the vacuum chamber, and close the vacuum chamber door;

2) Turn on the main power switch and set parameters through the touch screen;

3) The equipment will run automatically according to the set parameters (vacuum → air intake → discharge → empty). After the treatment, the buzzer will ring to remind the operator that the experiment has been completed;

4) Open the vacuum chamber door cover and take out the processed items.

6. Principle of Plasma Cleaning

• Introduction of Plasma:

Plasma is a kind of existing state of substance. It is usually juxtaposed with the solid, liquid and gaseous states of a substance and is called the "fourth state of matter". It can use the plasma high-energy particles and the material surface physical and chemical reaction to realize the material surface activation, etching, decontamination and other processes, as well as the material friction coefficient, adhesion and hydrophilic and other surface properties of the purpose of improvement.

• Cleaning Effect of Plasma:

The surface of the treated material is cleaned chemically and physically by making the plasma and material surface contact and react using plasma cleaning technology (low temperature plasma characteristics) in order to improve surface smoothness, implant new chemical functional group and realize etching.

(1) Cleaning and activation for material surface

(2) Form new functional group- Chemical effect.

If reactant gas is introduced into electricity-discharged gas, complex chemical reaction will happen to the surface of activated material. New functional groups will be introduced, such as hydrocarbyl, amidogen and carboxyl, all of which are active groups and could improve the activity of material surface significantly.

(3) Plasma etching.

Plasma etching means a process of removing volatile gaseous substance generated by creating plasma of a kind of proper gas chosen and substance on solid surface.

Plasma etching technique is actually a kind of reactive plasma process. The so-called direct plasma, also called reactive ion etching, is a kind of form under which plasma is etched directly. Its main advantages include high etching rate and evenness. The technological parameters of plasma play a vital role in etching effect.

7. Plasma Cleaning Process:

8. Plasma Cleaning Advantages:

• It replaces the traditional wet cleaning technology, and is green and environmentally friendly (containing no VOC).
• Gas serves as reaction medium so operation cost is low (oxygen).
• Broad range of application; treatment object and base material needn’t to be distinguished (material diagram).
• High cleaning efficiency and easy to realize automation.
• Improve material surface performance and adhesive force while removing dirt.

9. Comparison Before and After Plasma Treatment:

The contact Angle of liquid on the surface of solid material is an important parameter to measure the wettability of liquid on the surface of material.If θ<90°,the solid surface is hydrophilic, and the smaller the Angle, the better the wettability; if θ>90°, the solid surface is hydrophobic.

The measurement of the dyne value is very common in printing, coating, laminating, welding and other applications. It can reflect the ability of the material surface to bond easily. In general, the greater the dyne value, the better the bonding performance of the surface with another material.

10. Common Applications:

Surface modification of polymer materials Improves surface bonding property

Removal of oxide residue of electronic components, improve the bond quality and enhance the bonding effect.

Glass substrates remove organic contaminants

Removal of oil from metal surfaces

Graphene and other powder cleaning modification

PDMSSurface activated bonding

11. Qaulity Assurance and After Salse Services:

1 year warranty,If the equipment fails during the warranty period,supplier should arrange personnelto follow up and deal with until troubleshooting.

1) Accessories and Information with equipment.

When the equipment is delivered, the supplier shall provide a complete set of technical documents concerning operation, commissioning and maintenance, including operation and maintenance manuals.The maintenance manual should contain circuit diagram, gas circuit diagram and pipeline diagram.

2) The installation

Provide all details needed to prepare for site equipment installation.

3) Training

During installation, training can be provided remotely, including normal operation, repair and maintenance, analysis of tank problems and emergency procedures.

4) Equipment delivery to use and after-sales technical service

Supplier shall provide the documents of equipment installation, operation and maintenance, and technical support for operation training.Also a copy of the warranty indicating the effective date and coverage of the warranty and the contact person of Seller.