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PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
Specifications
Brand Name :
PRM
Model Number :
Custom
Certification :
ISO9001
Place of Origin :
China
MOQ :
1pc
Price :
Negotiate
Payment Terms :
T/T
Supply Ability :
5tons/month
Delivery Time :
5~7days
Packaging Details :
Plywood case
Name :
PVD coating Tantalum target
Grade :
Ta1 Ta2 RO5200 RO5400 RO5252 RO5255
Purity :
≥99.95%
Density :
16.68g/cm3
Surface :
machined surface
Standard :
ASTM B708
Delivery status :
Annealed
Shape :
Flat target Rotating target Special-shaped customization
Description

Product Information:

Name PVD coating tantalum target
Grade Ta1 Ta2 RO5200 RO5400 RO5252 RO5255
Purity ≥99.95%
Density 16.68g/cm3
Surface Machined surface, no pits, scratches, stains, burrs and other defects
Standard ASTM B708
Shape Flat target, Rotating target ,Special-shaped customization

PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical CoatingPVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

Chemical Content of PVD Coating Tantalum Target:

Grade Main elements 　 Impurity content less than %
　 Ta Nb Fe Si Ni W Mo Ti Nb O C H N
Ta1 Remain —— 0.005 0.005 0.002 0.01 0.01 0.002 0.04 0.02 0.01 0.0015 0.01
Ta2 Remain —— 0.03 0.02 0.005 0.04 0.03 0.005 0.1 0.03 0.01 0.0015 0.01
TaNb3 Remain ＜3.5 0.03 0.03 0.005 0.04 0.03 0.005 —— 0.03 0.01 0.0015 0.01
TaNb20 Remain 17.0～23.0 0.03 0.03 0.005 0.04 0.03 0.005 —— 0.03 0.01 0.0015 0.01
Ta2.5W Remain 　 0.005 0.005 0.002 3 0.01 0.002 0.04 0.02 0.01 0.0015 0.01
Ta10W Remain 　 0.005 0.005 0.002 11 0.01 0.002 0.04 0.02 0.01 0.0015 0.01

Feature of PVD Tantalum Target:

High melting point,
Low steam pressure,
Good cold working performance,
High chemical stability,
Strong resistance to liquid metal corrosion,
The surface oxide film has a large dielectric constant

Application:

The tantalum target and the copper back target are welded, and then semiconductor or optical sputtering is performed, and the tantalum atoms are deposited on the substrate material in the form of oxides to achieve sputtering coating; tantalum targets are mainly used in semiconductor coating, optical coating and other industries . In the semiconductor industry, metal (Ta) is currently mainly used to coat and form a barrier layer through physical vapor deposition (PVD) as a target material.

We can process according to customer's drawing, and produce Ta rod,plate,wire,foil,crucible etc.

Please send us an inquiry for more information

PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

Product tags

black pvd coating

,

rtv silicone coating

,

pvd coating
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PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

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Product Detail
Brand Name :
PRM
Model Number :
Custom
Certification :
ISO9001
Place of Origin :
China
MOQ :
1pc
Price :
Negotiate
Contact Supplier
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating
PVD Coating Tantalum Sputtering Target For Semiconductor Coating And Optical Coating

Shaanxi Peakrise Metal Co.,Ltd

Site Member
3 Years
Shaanxi, baoji
Since 2010
Business Type :
Manufacturer, Exporter
Main Products :
Molybdenum Tungsten Alloy, Tungsten Nickel Iron Alloy, Tungsten Boat
Total Annual :
1000000-5000000
Employee Number :
20~50
Certification Level :
Site Member
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