AWM5102VN Flow Sensor Mass Air 0 SLPM to 10 SLPM Silicon Materials
FEATURES
1 Linear voltage output
1 Venturi design
1 Remote mounting capability
1 Active laser trimming improves interchange ability
1 Separate gas calibration types:
– Ar (argon)
– N2 (nitrogen) or
– CO2 (carbon dioxide)
In-Line Flow Measurement
AWM5000 Series Microbridge Mass Airflow Sensors feature a venturi type flow
housing. They measure flow as high as 20
standard liters per minute (SLPM) while
inducing a maximum pressure drop of
2.25N H2O. The microbridge chip is in direct contact with the flow stream, greatly
reducing error possibilities due to orifice
or bypass channel clogging.
Datasheet:
Output voltage | 5V |
Operating supply voltage | 8 V to 15 V |
Port size | 6.35 mm |
Shell Material | Silicon |
Maximum | operating temperature: + 70 C |
Minimum | operating temperature: - 20 C |
Unit weight | 60 g |