S8553 Silicon Photodiode Vacuum Ultraviolet VUV Monitoring Photodiode
The S8553 has sensitivity in the vacuum ultraviolet region. It is particularly suitable for excimer laser (ArF: 193 nm, KrF: 248 nm) monitoring.
Its design optimized for use in the VUV region improves the stability of VUV light irradiation sensitivity compared to previous products.
Features
- Improved reliability of excimer laser (ArF: 193 nm, KrF: 248 nm)
- Large photosensitive area: 18 × 18 mm
- Windowless package: 25.5 × 25.5 mm ceramic package
Photosensitive area | 18 × 18 mm |
Package | Ceramic |
Package category | Unsealed |
Cooling | Uncooled |
Reverse voltage (max) | 5 V |
Spectral response range | 190 to 1000 nm |
Photosensitivity (typical) | 0.06 air/W |
Dark current (max) | 5000 Pa |
Rise time (typical) | 18 μs |
Terminal capacitance (typical) | 8000 pF |