Mg-doped Stoichiometric Lithium Tantlate LiTaO3 Wafer for designing High-Power-Frequency Converters
Mg-doped stoichiometric lithium tantalate (SLT) is a promising material in high power generation, due to its high thermal conductivity. The accuracy of the temperature-dependent Sellmeier equation for Mg-doped SLT is important for designing high-power-frequency converters. We propose a temperature-dependent Sellmeier equation for the extraordinary refractive index of 1.0 mol % Mg-doped SLT. The equation is fitted with measured data in the first-order quasi-phase-matched (QPM) second harmonic generation (SHG) and optical parametric oscillation (OPO) with the fundamental and pump wavelengths being both 1.064 m and previously published data [Jpn. J. Appl. Phys. 41 (2002) 465] of SLT. The equation allows us to predict accurate QPM periods in the range of 0.5-4 m wavelength and in temperature range of 30-170 °C.
Diameter | 76.2±0.2mm | 100±0.2mm | 150±0.2mm |
Primary Flat | 22±1mm | 32±1mm | 47.5mm, 57.5mm, Notch |
Orientation | 36°Y, 42°Y, X-112°Y, Y, Z | ||
Thickness | 0.07mm~1.0mm | 0.1mm~1.0mm | 0.35mm~1.0mm |
Surface finish | Single / Double side polish / Double side lapped | ||
TTV | < 1~5µm | ||
BOW | ± (20µm ~40um ) | ||
Warp | <= 20µm ~ 50µm | ||
LTV (5mmx5mm) | <1.5 um | ||
PLTV(<0.5um) | ≥98% (5mm*5mm) with 2mm edge excluded | ||
Polished side Ra | Roughness Ra<=5A | ||
Back Side Criteria | Roughness Ra:0.5-1.0µm, GC#1000 | ||
Scratch & Dig (S/D) | 20/10, 40/20, 60/40 | ||
Edge Profile | Compl't with SEMI M1.2@with GC800# .regular at C typed | ||
Cracks, saw marks, stains | None |
Crystal Structure | Trigonal, Space group R3c, Point group 3m |
Cell Parameters | a=5.154Å, c=13.781Å |
Melting Point | 1650℃ |
Curie Temperature | 607℃ |
Mohs Hardness | 5.5 |
Density | 7.46g/cm3 |
Dielectric Constants | ε11/ε0:51.7 |
ε33/ε0:44.5 | |
Elastic Stiffness Coefficients | CE11:2.33(×1011N/m2) |
CE33:2.77(×1011N/m2) | |
Piezoelectric Strain Constants | d22:2.4(×10-11C/N) |
d33:0.8(×10-11C/N) | |
Transmission range | 400-4500nm |
Electro-optical coefficients | r33=30.4pm/V |
Refractive index at 632.8nm | no=2.176, ne=2.180 |
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