Carrier wafer made of Glass and Monocrystal Quartz for Thin Wafer Handling System
Based on the market demand for small devices, there is ongoing wafer thickness reduction in the MEMS and semiconductor industry. Carrier wafers are needed to enable handling and processing of the thin and ultra-thin wafers.
Glass and Quartz are excellent materials for carrier wafers because of their thermal stability and resistance against acids and other chemicals. Bonding to and de-bonding from glass and quartz carrier wafers can be monitored since they are transparent.
BonTek Optoelectronics provides all types of Glass wafers, as well as high quality Single Crystal Quartz wafers in both SAW grade and Optical grade at a very reasonable price. We are equipped with FlatMaster 200 and Automated Optical Inspectors (AOI), which enables excellent flatness and surface roughness.
Material | Single Crystal Quartz Blanks (SAW / Optical grade) |
Synthetic Q-Value | Min 1.8×10^6, 2.4×10^6, 3.0×10^6 (IEC standards) |
Etch Channel Density (ECD) | 2/cm2,10/ cm2,30/ cm2,100/ cm2,300/cm2;Swept Quartz (IEC standards) |
Inclusions Density | Ia,Ib,I, II,III Grades (IEC standards) |
Material | Fused Quartz, Borosilicate, Soda Lime Glass |
SCHOTT | Borofloat33 / BK7 / B270 / D263 etc. |
CORNING | Eagle XG, Fused Silica 7980 / 7978 / 7979 etc. |
Feilihua | Fused Silica JGS1 / JGS2 & Single quartz etc. |
OHARA | SK-1300, SK-1310 |
GM | H-K9L / Soda Lime etc. |
Spec | unit | 4" | 6" | 8" | 10" | 12” |
Diameter (or square) | mm | 100 | 150 | 200 | 250 | 300 |
Tolerance (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
Thickness | mm | 0.10 or more | 0.30 or more | 0.40 or more | 0.50 or more | 0.50 or more |
Primary flat | mm | 32.5 | 47.5 / 57.5 / Notch | Semi-Notch | Semi-Notch | Semi-Notch |
LTV (5mmx5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
TTV | µm | < 2 | < 3 | <3 | <5 | <5 |
Bow | µm | ±20 | ±30 | ±40 | ±40 | ±40 |
Warp | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
PLTV (5mm*5mm) <0.4um | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | ||||
Surface Type | Single Side Polished /Double Sides Polished | |||||
Polished side Ra | nm | ≤1 | ||||
Back Side Criteria | µm | general 0.2-0.7 or customized |
FAQs:
A: We look at ourselves as the piezo wafer specialist. We are the very first to work with Single Crystal Quartz in China about 30 years ago. Then gradually we step in the field of LiNbO3, LiTaO3, Quartz glass, LGS, CTGS etc. Especially, if you are looking for a piezo quartz supplier, we are the ultimate choice! We export millions of quartz blanks each year because we master the AT, SC and IT cuts with superior angle precision.
A: Yes, of course. We can fabricate as per your request. In addition, we are so experienced with piezo wafers that we can provide you relevant suggestions if you are not 100% sure about your choice. Besides, we do have some standard wafers in stock, please check with us.
A: Yes, we would suggest you go with the courier agent you are most familiar with (DHL, FedEX, UPS etc.). We can ship via your account. And, of course, we will pack the products safely in acceptable size to help you save the shipping cost. If you need us to take care of the freight, it’s also not a problem. We also have good discount with the international courier companies.
A: The wafer products are fragile and sometimes expensive. The last thing, as the manufacturer, we want to see is the products we make were damaged during courier. As a result, we will pack the wafers adequately and put them in a proper carton filled with buffer sponge. However, accidents are inevitable sometimes. So, please follow the “Acceptance check” steps shown in the drawings below. If the unwanted happened, we will either give the replenishment or refund if you follow the checking steps.
A: Sure. Factory inspection is important for large quantity purchase and long-term cooperation. Face to face discussion is what we mostly confident with. During the past years, big names around the world have witnessed our progress in factory build-up. These days, due to the Covid-19 pandemic, we also had the experience of videoconferencing with global buyers.
Acceptance Check