Compound Semiconductors Lithium Tantalate Wafer used for Optical Devices, SAW Devices

Compound semiconductors are the semiconductors composed of more than two chemical elements. Lithium Tantalate(LiTaO3) wafer is used for several optical devices, especially surface acoustic wave(SAW) device. Because of the lithography in SAW device process, LiTaO3 polishing is needed. In this paper, the commercial slurries(NALCO2371^(TM), ILD1300^(TM), ceria slurry) used for chemical mechanical polishing(CMP) were tested, and the most suitable slurry was selected by measuring material removal rate and average centerline roughness(Ra).

FAQs:

1. Q: What are the products you mainly work on?

A: We look at ourselves as the piezo wafer specialist. We are the very first to work with Single Crystal Quartz in China about 30 years ago. Then gradually we step in the field of LiNbO3, LiTaO3, Quartz glass, LGS, CTGS etc. Especially, if you are looking for a piezo quartz supplier, we are the ultimate choice! We export millions of quartz blanks each year because we master the AT, SC and IT cuts with superior angle precision.

2. Q: Can you accept product customization?

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A: The wafer products are fragile and sometimes expensive. The last thing, as the manufacturer, we want to see is the products we make were damaged during courier. As a result, we will pack the wafers adequately and put them in a proper carton filled with buffer sponge. However, accidents are inevitable sometimes. So, please follow the “Acceptance check” steps shown in the drawings below. If the unwanted happened, we will either give the replenishment or refund if you follow the checking steps.

Acceptance Check

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