The MFC 900 Series digital gas mass flow controller utilizes advanced microelectromechanical system (MEMS) flow sensor chip technology. It is ideal for applications requiring the measurement and control of clean, relatively dry small gas flows. Its unique packaging technology enables the controller to accommodate various flow measurement ranges, ensuring high sensitivity, reliability, stability, and cost-efficiency.
The MFC 900 series is designed around an MEMS flow sensing unit combined with a high-precision digital processing and calibration circuit (MCU). The integrated Δ - Σ A/D converter, logic circuit with internal calibration functionality, MCU processor, and display unit work in tandem to ensure real-time, accurate signal acquisition and flow measurement. This system requires no external calibration compensation, ensuring precise flow output. Its user-friendly digital output communication allows for easy access to comprehensive data, making it suitable for a wide range of applications.
Functional Items | MFC 900 Series Gas Mass Flow Controller | Unit | Remarks |
---|---|---|---|
Specifications | 50, 100, 200, 500, 800, 1000 SCCM; 2, 5, 8, 10, 12 SLPM | ||
Scale Ratio | 100:1 | ||
Power Supply Voltage | 7~24 VDC, 100 mA | VDC | Customizable |
Accuracy | ±1.0 | %FS | |
Repetitiveness | 0.25 | % | |
Response Time | 67 (Default) | ms | Customizable |
Maximum Pressure | 1.0 | MPa | |
Communication Mode | RS 485 (MODBUS) | ||
Output Method | Analog output of 0.5-4.5 VDC; LoRa | VDC | Optional |
Display Mode | Instantaneous flow: SLPM; cumulative flow: SL | ||
Temperature | Medium: -10~65°C, Ambient: -25~85°C | °C | |
Working Humidity | <100% RH (no ice, no condensation) | ||
Weight | 0.295 | kg | |
Connection | NPT 1/8” | Customizable | |
Valve Type | Normally Closed | ||
Calibration Conditions | Air, 20°C, 101.325 kPa |
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