CAFS6000 Humidity: 0100% RH * Operating temperature: -15°C to 70°C Storage temperature: -25°C to 85°C
Selection table:
specifications and models | Flow range |
remarks | |
mL /min ( sccm ) | L/min ( SLPM ) | ||
CAFS 6002 | 0-2000 | 0-2 | |
0-5 | |||
0-10 |
■ High accuracy (1.5%F. S accuracy)
■ The linear output and the temperature compensation
■ Maintain long-term stability with minimal zero-drift
■ Solid-state sensing core (no surface cavity or fragile film), resistance to blockage and pressure impact
■ Analog output (1 to 5V) (I2C output is also available)
■ Wide flow range 0 sccm-12000 sccm 0-10slpm
■ Can be adapted to the relatively humid gas measurement
■ Quick response time (65-ms response time)
maximum rating
■ Operating temperature: -15°C to 70°C
■ Storage temperature: -25°C to 85°C
■ Humidity: 0100% RH *
■ 100 g
■ The sensor is resistant to condensate water