High Precision 50.8mm 2inch 0.1mm 0.43mm Thickness Quality Sapphire Wafer Orientation A-Plane M-Plane
Sapphire Substrate is a high-precision product for different size of sapphire substrate, including 2inch, 4inch and 6inch. It has clear aperture of over 90%, surface roughness of Ra less than 0.5nm, TTV of less than 5μm, perpendicularity of 3 arc sec and surface orientation of ±0.5°. It is available in both C-plane and M-plane, and A-plane is optional. Sapphire Substrate is ideal for industrial, medical and other applications.
The ZMSH Sapphire Substrate is a perfect choice for those who need high quality 2inch, 4inch and 6inch sapphire windows, sapphire wafers and sapphire substrates. It is made of Al2O3 99.999%, with a surface orientation of ±0.5°, a surface roughness of Ra<0.5nm, a TTV of <5μm and a parallelism of 3 arc sec. It is available in two different types, C-plane and M-plane, for various applications. It is widely used in the fields of optoelectronics, photovoltaics, semiconductors, displays, etc. With superior performance, it offers excellent optical transmission, high thermal conductivity and superior mechanical strength. The Sapphire Substrate from ZMSH is a cost-effective solution for your projects.
Substrate Type | Single Crystal |
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Surface Roughness | Ra<0.5nm |
Parallelism | 3 Arc Sec |
TTV | <5μm |
Perpendicularity | 3 Arc Sec |
Warp | <20μm |
Thickness | 0.5-2mm |
Surface Orientation | ±0.5° |
Clear Aperture | >90% |
Bow | <20μm |
No | (Properties) | (Target) | (Tolerance) | ||||||||||||||||||||||
1 | Diameter | 50.8mm | ± 0.1mm | ||||||||||||||||||||||
2 | Thickness | 430μm | ±15μm | ||||||||||||||||||||||
3 | Surface orientation of C-plane | off C-axis to M0.2° | ± 0.1° | ||||||||||||||||||||||
4 | Primary flat length | 16mm | ±11mm | ||||||||||||||||||||||
5 | Primary flat orientation | A-plane(11-20) | ±0.1° | ||||||||||||||||||||||
6 | Back side Roughness | 0.8~1.2um | |||||||||||||||||||||||
7 | Front side Roughness | <0.3nm | |||||||||||||||||||||||
8 | Wafer edge | R-type | |||||||||||||||||||||||
9 | Total Thickness Variation, TTV | ≤ 10μm(LTV≤5μm,5*5) | |||||||||||||||||||||||
10 | SORI | ≤10μm | |||||||||||||||||||||||
11 | Bow | -10 μm ≤ BOW ≤ 0 | |||||||||||||||||||||||
12 | Laser Mark | N/A | |||||||||||||||||||||||
13 | Package | 25 wafers in one cassette | |||||||||||||||||||||||
Trace ability | Wafers shall be traceable with respect to cassette number | ||||||||||||||||||||||||
ZMSH Sapphire Substrate is a high-quality single-crystal product with superior surface quality. The product is made of C-plane or M-plane sapphire windows and has a thickness of 0.5-2mm. The warp of the sapphire wafer is less than 20μm and the parallelism is 3 arc seconds.
Sapphire substrate material is a kind of LED chip substrate material, sapphire stability is very good, can be used in the high temperature growth process; Finally, sapphire has high mechanical strength and is easy to handle and clean. Therefore, most processes generally use sapphire as a substrate
Sapphire Substrate Packaging and Shipping:
Each sapphire substrate is packed in an individual box and shipped in a bubble-wrap lined box.
The boxes are filled with foam to keep the sapphire substrates secure during transportation.
The packages are then sealed with tape and labeled with the product information.
The packages are then carefully loaded onto the shipping pallet and shipped to the customer.