6 Inch LiTaO3 LiNbO3 Wafer Black Polarized For SAW / BAW Applications 128 Degrees Y Z-Cut

Lithium niobate (LiNbO3) single crystal is a ferroelectric crystal with high electromechanical coupling coefficient and low propagation loss, which can be used to fabricate SAW devices with up to 50% bandwidth. The acoustic surface wave properties of lithium niobate single crystal materials are closely related to their orientation and propagation direction. According to different cutting angles and propagation directions, the saw propagation velocity is 3400~4000m/s, the electromechanical coupling coefficient is 0%~5.6%, and the temperature coefficient is -1.1~-95.6(10^-6/℃).

Lithium tantalate (LiTaO3) has piezoelectric, electro-optical and nonlinear optical characteristics, and a wide transparency range going from ultraviolet to infrared. It is desirable that LiTaO3 wafer was a smooth surface in order to function with good quality. Chemical mechanical polishing (CMP) has been used to planarize integrated circuits (ICs) or obtain a high surface quality of the substrates. This paper investigates the effect of citric acid as an additive in the slurry for LiTaO3 CMP. The roughness of the wafers was measured by an atomic force microscopy (AFM, XE-100) after polishing. The slurry, which contains citric acid as an additive, has a higher material removal rate and friction force than a slurry without an additive. After polishing, the surface roughness of the LiTaO3 wafer can be reduced down to 1.7A of Ra.

Characteristic Specification

Display of LiTaO3 Wafer and LiNbO3

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