SiC ceramic tray plate,for 2inch 4inch 6inch wafer processing and Custom size

SiC ceramic tray plate’s brief

SiC (Silicon Carbide) ceramic tray plates are specialized components designed for high-performance applications, particularly in the semiconductor industry. These trays play a critical role in the fabrication process of semiconductor devices, providing a stable and reliable platform for processing silicon wafers. Renowned for their exceptional thermal stability, SiC ceramic trays can withstand the high temperatures required during various stages of wafer processing, such as epitaxy, diffusion, and oxidation.

In addition to their thermal properties, SiC trays exhibit remarkable mechanical strength, allowing them to support heavy substrates without deforming or cracking. Their excellent chemical resistance ensures durability in the presence of corrosive materials often encountered in semiconductor manufacturing processes.

Moreover, SiC ceramic tray plates contribute to improved heat distribution, which is essential for maintaining consistent processing conditions across the wafer surface. This feature helps minimize defects and enhances the overall quality of semiconductor devices.

These versatile trays can also be customized in various sizes and shapes to meet specific manufacturing requirements, making them an indispensable asset in the semiconductor industry, where precision and reliability are paramount.

SiC ceramic tray plate’s properties

High Thermal Stability:

SiC ceramic tray plates can withstand extreme temperatures, making them suitable for high-temperature applications such as sintering and semiconductor processing.

Excellent Mechanical Strength:

They possess superior strength and hardness, allowing them to support heavy loads without deformation, ensuring durability and longevity.

Chemical Resistance:

SiC trays are highly resistant to corrosion and chemical attack, making them ideal for use in aggressive environments, particularly in chemical processing and semiconductor manufacturing.

Thermal Conductivity:

These plates exhibit good thermal conductivity, promoting efficient heat distribution, which is essential in processes that require uniform temperature control.

Lightweight:

Despite their strength, SiC ceramic trays are relatively lightweight, facilitating easier handling and transportation during manufacturing processes.

Electrical Insulation:

SiC materials provide excellent electrical insulation properties, making them suitable for use in electronic applications where electrical conductivity must be minimized.

Low Thermal Expansion:

The low coefficient of thermal expansion ensures dimensional stability under varying temperature conditions, reducing the risk of warping or cracking.

Customizability:

SiC ceramic tray plates can be produced in various sizes and shapes, allowing for customization to meet specific application needs.

These properties make SiC ceramic tray plates an essential component in various industries, particularly in semiconductor fabrication, high-temperature sintering, and chemical processing.

SiC ceramic tray plate’s applications

Semiconductor Manufacturing:

SiC ceramic tray plates are widely used to support silicon wafers during various fabrication processes, including epitaxy, diffusion, and oxidation. Their high thermal stability and mechanical strength ensure optimal processing conditions and minimize defects.

High-Temperature Sintering:

In the production of advanced ceramics and materials, SiC trays are employed in high-temperature sintering processes, providing a reliable platform that withstands extreme conditions without deforming.

Chemical Processing:

Due to their excellent chemical resistance, SiC ceramic trays are ideal for handling aggressive chemicals in laboratories and industrial settings. They are used in reaction vessels, distillation columns, and other equipment that requires durability against corrosive substances.

Electronics and Electrical Components:

SiC trays serve as substrates in the manufacturing of electronic devices and components, where their insulating properties and thermal conductivity are crucial for maintaining performance and reliability.

Optical Applications:

In optical component manufacturing, SiC trays are used to support and process materials that require precise temperature control and stability, ensuring high-quality end products.

Aerospace and Automotive Industries:

SiC ceramic tray plates are utilized in aerospace and automotive applications for their lightweight and high-strength characteristics, particularly in components that require thermal management and corrosion resistance.

Research and Development:

In R&D environments, SiC trays are often employed for experimental setups that involve high temperatures or corrosive chemicals, providing a robust platform for innovative materials testing.

SiC ceramic tray plate’s ehxibition