2inch DSP Sapphire Wafer
Description
Synthetic sapphire—sometimes referred to as sapphire glass—is commonly used as a window material, because it is both highly transparent to wavelengths of light between 150 nm (UV) and 5500 nm (IR) (the visible spectrum extends about 380 nm to 750 nm, and extraordinarily scratch-resistant.
Specification
Crystal Orientation | C-plane (0001) miscut to M |
Mis-Orientation Towards Laser Mark | 0.3° off axis ± 0.1° Towards M plane (90° away from major flat assumed to be cut along an a-plane) Away from the r (102) direction |
Mis Orientation Towards Primary Flat | 0° ± 0.1° |
Wafer Diameter | 50.8± 0.05mm |
Thickness | 430± 20mm |
Major Flat | 16.0mm ± 1.0mm |
Major Flat Location | A-axis ± 0.3° |
Front Surface | Epi Polish< 0.3nm |
Backside Roughness | <1micron |
TTV | £ 10mm |
Warp | £ 10mm |
Bow | £ 10mm |
Edge Condition | Edge defect not to exceed SEMI M3-91,Table 2 |
Substrate Laser Marking | Standard Backside, parallel to flat |
Packaging | Class 100 clean room environment, in cassettes of 25, under a nitrogen atmosphere |
The 2inch DSP double side polished sapphire substrates can be manufactured from high quality optical grade Kyropoulos grown sapphire crystals.
high purity single crystal sapphire epitaxial substrate is suitable for direct epitaxial process, PSS process, ALN process and other epitaxial methods. It has the characteristics of uniform wavelength, high brightness and small STD. we can accept product customization for the technical specifications, and produce sapphire single / double polishing substrates with different external dimensions based on C (0001), a (11-20) and m (1100) crystal orientations, with notch or straight edge crystal orientations.
Process Flow