High stability and high transmittance LED Sapphire Substrate
Product Description
Al2O3 single crystal (Sapphire, also known as white sapphire, sapphire) has very good thermal properties, excellent electrical and dielectric properties, and is resistant to chemical corrosion. It is resistant to high temperatures, good thermal conductivity, high hardness, infrared transmission, and chemical stability. Good sex. Widely used in high-temperature infrared window materials, III-V group nitrides and a variety of epitaxial film substrate materials, in order to meet the growing demand for blue, violet, and white light-emitting diodes (LED) and blue lasers (LD), we specializes in the production of high-quality sapphire crystals and epitaxially polished substrates, and will provide you with a large number of high-quality and low-price single crystals and substrates.
Technical Specification
Front Side Surface | Mirror polished , EPI-Ready |
Surface Roughness | Ra < 3Å |
Back Side Roughness | Fine ground, Ra=1.0±0.2um |
TTV | ≤ 5.0μm |
BOW | 0~-5um |
Warp | ≤ 10.0μm |
Bubble & Color | None by visual inspection in intensive light |
Ground Boundary | None by visual inspection in fluorescent light |
Cleanliness | Free visible contamination |
Measurement method
The bending (BOW) refers to the distance between the center point of the neutral plane of the free unclamped wafer and the reference plane of the neutral plane. The median plane reference plane is a plane determined by three equidistant points on the designated diameter circle that is smaller than the nominal diameter of the wafer.
When measuring the bending of the sapphire substrate, under the non-adsorption state, the virtual plane calculated by the least square method is used as the reference plane for measurement. The BOW value is the sum of the absolute value of the workpiece center measurement value (measurement surface) and the absolute value of the measurement value with the largest absolute value, which is different from the center value sign. The symbol is the symbol of the center measurement value.
Regarding the BOW value standard, there are specific provisions in the SEMI related standards. However, with the development of sapphire substrate patterning (PSS), epitaxial manufacturers have higher requirements for the curvature of sapphire substrates, and the industry has reached a higher consensus on this index.
Silian Optoelectronic Technology is committed to the research and development , manufacturing and sales of higher-quality sapphire substrates. It has core equipment and realizes the core process of combining equipment and materials. It has the ability to produce high-quality sapphire substrates, and the BOW value of the produced sapphire substrates is better than Industry level.