Chemical Vapor Deposition Furnace for cutting tools
The equipment is designed for carbide cutting tools, which can be coated with TiC, TiN, TiCN and Al2O3, hardened thin-film material. CVD coating and the matrix of high binding strength, strong adhesion, good uniformity, complex shape of the work piece can also get uniform coating, film thickness up to 5-20 μm.
The reactor is cast by centrifugal casting technology, which can greatly reduce the deformation, and the service life can reach more than 200 circles.
The furnace is equipped with dual reactors chamber, economical and eficient, low maintenance cost, safe and environmental protection, and can flexibly meet the increasing CVD process needs in the future.
Equipmentmodel | CVD430-1250 | CVD430-1600 | CVD530-1250 | CVD530-1600 | CVD630-1250 | CVD630-1600 |
Effective space(mm) | Φ400X1250 | Φ400X1600 | Φ500X1250 | Φ500X1600 | Φ600X1200 | Φ600X1600 |
Heating power(KW) | 39 | 48 | 45 | 55 | 65 | 80 |
Quantity of heating zone | 4 | 5 | 4 | 5 | 4 | 5 |
Equipment footprint(mm) | 6000*5800*4800 | 6000*5800*5100 | 6500*6000*4800 | 6500*6000*5100 | 7200*6200*4800 | 7200*6200*5100 |
Process temperature(℃) | 700-1050 | |||||
Precursors and process gases | TiCL4,AICL3,CH3CN,H2,N2,Ar,CH,CO,CO2,HCI,H2S | |||||
Types of coating | TiC,TiN,TiCN,a-AL2O3,K-AI2O3 | |||||
Optional equipments |
1. Off gas neutralizer (incl.evacuating device); 2. Second stage gas distributor (incl.,pipeline); 3. Gas station (incl.pipeline) |
• Design standards
The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.
• Installation pre-test and pre-acceptance
The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.
• Disassembly and transportation
The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.
• Customer site installation and commissioning
The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).
• Final acceptance
After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.
• Training
Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.
• Technical data delivery
To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:
1. Equipment installation layout
2. User manual
3. Spare parts list
4. Electrical drawings
5. Component manual
FAQ
Q: Are you a factory or trading company?
A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.
Q: Do you have customization or OEM service??
A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.
Q:What's your advantage?
A:
l Quick response to your enquiry
l High quality control
l Stable supply chain
l Timely delivery
l Excellent after-sales service