An online basket spray cleaning machine developed specifically for cleaning semiconductor products TW-CL360
The online basket spray cleaning machine is a device developed specifically for cleaning semiconductor products. The equipment has unique rotating spray and multi slot vibration rinsing functions, and each cleaning section is equipped with precision filtering devices. FFU filters are installed on the top of the machine, ensuring overall cleanliness during machine operation.
The online basket spray cleaning machine is a device developed specifically for cleaning semiconductor products. The equipment has a unique rotating spray and multi slot vibration rinsing function. The workpiece is transported by a mechanical arm to each section for cleaning, rinsing, and drying before being sent out. Each section is equipped with precision filtering devices, and FFU filters are installed on the top, as well as various instruments to ensure the safe operation of the machine, such as resistivity meters, temperature meters, and pressure gauges
The equipment operation is simple, just press the start button, and all processes are automatically completed by the machine according to the predetermined program.
Feed Spray cleaning
Oscillating rinsing
Oscillating rinsing
Discharge
Serial Number | production processes | beat | Cleaning medium | notes |
1 | Entering the board | / | / | Dockable,upstream equipment (standard MES interface) |
2 | Spray cleaning | 1-5min | DI water/cleaning agent | Rotating spray cleaning inside the chamber |
Cold air cutting water | 1-5min | compressed air | Rotary drying inside the chamber | |
3 | Vibration rinsing | 1-20min | DIwater/cleaning agent | Rinsing,workpiece vibrates up and down simultaneously |
4 | Vibration rinsing | 1-20min | DIwater | Rinsing,workpiece vibrates up and down simultaneously |
5 | Output board | / | / | Dockable downstream equipment (standard MES interface) |