Description MF4000 Gas MEMS Therma mass flow meter air flow meter
The MF4000 series mass flow meters are designed for applications of gas flow measurement in a pipe diameter not larger than 8mm. The products can be applied to measure any clean gas from 0-0.5 SLPM up to 0-30SLPM, depending on the product configuration. Customization is also available for high volume applications.
Detailed Images MF4000 Gas MEMS Therma mass flow meter air flow meter
Features MF4000 Gas MEMS Therma mass flow meter air flow meter
Designed for low gas flow in fixed flow channel of 3 mm and 8 mm, with accumulated flow register |
Compact design ready for manifold assembly |
Fast response time for solutions of critical applications |
Excellent for manifold process gas monitor and control |
Exchangeable mechanical connectors for easy installation at different applications |
Specificagtion MF4000 Gas MEMS Therma mass flow meter air flow meter
Parameter | MF4003 | MF4008 | Unit | |
DN | 3 | 8 | mm | |
Flowrate Range | 0 ~ 2, 3, 4, 5 0 ~ 10, 20, 30, 40, 50 | SLPM | ||
Turn-down | 100:1 | |||
Accuracy | ± (1.5 + 0.2 FS) | % | ||
Repeatability | 0.25 | % | ||
Null Shift | ± 30 | mV | ||
output Shift | ± 0.12 | % /ºC | ||
Response Time | 10 (default, 10, 20, 50, 200, 500, 1000 selectable) | msec | ||
Power Supply | 8 ~ 24 Vdc, 50 mA | |||
output | Linear: Analog 0.5 ~ 4.5 Vdc; RS232, RS485 | |||
Display | 4 - digit, 7 - segment LED; 2 status LED | |||
Units | 1nstant flowrate: SLPM; Flow accumulation: SL | |||
Display Resolution | 0.001, 0.01, 0.1 selectable 0.01, 0.1 selectable | SLPM | ||
Pressure Drop | 100 600 | Pa | ||
Max. Pressure | 0.5 | MPa | ||
Working Teperature | -210 ~ +655 | ºC | ||
Storage Teperature | ||||
Humidity | < 95%RH (No icing or condensation) | |||
Mechanical Connection | BSPT 1/4 (R 1/4), 4 mm / 6 mm / 8 mm one - touch BSPT 1/4 (R 1/4) | |||
Keyboard | 3 Keys | |||
Pins out | 5 Pins, NS-TECH CD R-5 | |||
Calibration** | Air @ 20 ºC, 101.325 kPa | |||
Weight | 55(with BSPT 1/4 (R 1/4)), 74(with 4 mm / 8 mm one-touch), 71(with 6 mm one-touch) |
Calibration** Air @ 20 ºC, 101.325 kPaNotes: * The above parameters are applicable at 20o C and 101.325kPa.
** For other gases calibration, please contact siargo.
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