Description of Manifold gas flow sensors MEMS Mass Flow Meter
MF4000 series mass flow meters are designed for applications where manifold flow measurements. The standard flow channels are 3 mm and 8 mm in diameter, respectively. Plastic finishing with an easy change of the mechanical adaptors enables applications at a low cost and different environments. The meters can be used for process gas control, environmental samplers and many other industrial applications.
Detailed Images of Manifold gas flow sensors MEMS Mass Flow Meter
Feature of Manifold gas flow sensors MEMS Mass Flow Meter
Designed for low gas flow in fixed flow channel of 3 mm and 8 mm, with accumulated flow register |
Compact design ready for manifold assembly |
Fast response time for solutions of critical applications |
Excellent for manifold process gas monitor and control |
Exchangeable mechanical connectors for easy installation at different applications |
Specification of Manifold gas flow sensors MEMS Mass Flow Meter
Parameter | MF4003 | MF4008 | Unit | |
DN | 3 | 8 | mm | |
Flowrate Range | 0 ~ 2, 3, 4, 5 0 ~ 10, 20, 30, 40, 50 | SLPM | ||
Turn-down | 100:1 | |||
Accuracy | ± (1.5 + 0.2 FS) | % | ||
Repeatability | 0.25 | % | ||
Null Shift | ± 30 | mV | ||
output Shift | ± 0.12 | % /ºC | ||
Response Time | 10 (default, 10, 20, 50, 200, 500, 1000 selectable) | msec | ||
Power Supply | 8 ~ 24 Vdc, 50 mA | |||
output | Linear: Analog 0.5 ~ 4.5 Vdc; RS232, RS485 | |||
Display | 4 - digit, 7 - segment LED; 2 status LED | |||
Units | 1nstant flowrate: SLPM; Flow accumulation: SL | |||
Display Resolution | 0.001, 0.01, 0.1 selectable 0.01, 0.1 selectable | SLPM | ||
Pressure Drop | 100 600 | Pa | ||
Max. Pressure | 0.5 | MPa | ||
Working Teperature | -210 ~ +655 | ºC | ||
Storage Teperature | ||||
Humidity | < 95%RH (No icing or condensation) | |||
Mechanical Connection | BSPT 1/4 (R 1/4), 4 mm / 6 mm / 8 mm one - touch BSPT 1/4 (R 1/4) | |||
Keyboard | 3 Keys | |||
Pins out | 5 Pins, NS-TECH CD R-5 | |||
Calibration** | Air @ 20 ºC, 101.325 kPa | |||
Weight | 55(with BSPT 1/4 (R 1/4)), 74(with 4 mm / 8 mm one-touch), 71(with 6 mm one-touch) |
Calibration** Air @ 20 ºC, 101.325 kPaNotes: * The above parameters are applicable at 20o C and 101.325kPa.
** For other gases calibration, please contact siargo.
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