High Accuracy Mass Flow Meters, High Quality Gas Flow Meter 0 ~ 25slpm

Description

The MF4001 mass flow sensors from Shelok are engineered with cutting-edge MEMS technology for unparalleled performance. Ideal for applications needing precise measurement of low flow rates, from 030 sccm to 01000 sccm, these sensors boast a bespoke package and advanced electronics for heightened sensitivity and accuracy. The housing is made of chemically resistant and thermally stable polycarbonate, ensuring steadfastness under various conditions. With a high overpressure limit of 5 bar (73 psi), these sensors can handle tough environments, promising enduring reliability.

Specification

Notes:

1. Denotes ±(1.5% Reading+0.5% Full Scale). To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.

2. The response time is determined by ADC Sampling rate and data process algorithm. The default response time is 65 ms. It can be programmed via RS232 communication.

3. The maximum pressure drop is measured at flow rate 1000 sccm. For 500 sccm flow sensors, the pressure drop will be smaller. For 30, 100 and 200 sccm flow sensors, the flow pipe will be smaller, and the maximum pressure drop is <20 Pa at flow rate 200 sccm.

4. One DC power supply is necessary. The required minimum output current is 50mA. The sensor actually consumes less than that in operation.

5. Calibrations at other gases available upon request.

Detailed Images

Mechanical Dimensions

Sensor Selection

Features

! Low mass flow range from 0~30 sccm up to 0~1000sccm

! Outstanding Accuracy of ±1.5%

! Fast response (4 ms selectable)

! R Pressure rating up to 5 bar (73 psi)

! Analog and / or digital user interface

! Easy installation

Applications

The MF4001 series mass flow sensors by Shelok harness MEMS technology for exceptional performance. Designed for precision at low flow rates, from 030 sccm to 01000 sccm, these sensors integrate a tailored enclosure with sophisticated electronics for enhanced sensitivity and accuracy. Constructed with polycarbonate, the housing resists chemicals and maintains stability across temperature variations. Their robust design withstands up to 5 bar (73 psi) overpressure, making them dependable in harsh settings.

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