Good Force Characteristics VARS Series Swing Voice Coil Motor Made In China
Arc voice coil motors play an important role in the semiconductor industry, mainly focusing on precise positioning, adjustment, and control of semiconductor manufacturing and semiconductor equipment. The following are the important roles of arc-shaped voice coil motors in the semiconductor industry:
1. Semiconductor manufacturing equipment: Arc voice coil motors are widely used in semiconductor manufacturing equipment, such as etching machines, ion implantation machines, lithography machines, etc. These devices require high-precision position control and motion adjustment to achieve precise manufacturing of semiconductor chips.
2. Manipulators and robots: In semiconductor manufacturing, robotic arms and robots are commonly used for handling and processing semiconductor wafers. Arc-shaped voice coil motors can achieve motion control of robotic arms and robots, ensuring accurate handling and handling operations.
3. Welding and Packaging: During the semiconductor packaging and welding process, it is necessary to position and align the semiconductor chip to ensure accurate connection and packaging. The curved voice coil motor can be used to achieve precise chip positioning and adjustment.
4. Lithography and Mask Alignment: During the lithography and mask alignment process, it is necessary to make minor positional adjustments to the semiconductor wafer to ensure accurate transmission of the lithography pattern onto the wafer. The curved voice coil motor can be used to achieve fast and accurate position adjustment.
5. Testing and Measurement Equipment: The semiconductor industry requires high-precision testing and measurement equipment to verify the quality and performance of chips. Arc-shaped voice coil motors can be used to drive moving parts for precise measurement and detection operations.
VARS Series of Swing type voice coil motor | ||||||||
Model | Peak torque(N-M) | Continuous torque25℃(N-M) | Maximum travel(mm) | Voltage(V) | Back EMF constant(V/m/S) | Coil weight(g) | Width*height (mm) | Length(mm) |
VARS0008-026-00A | 0.080 | 0.045 | 26.0 | 6.4 | 0.045 | 11.7 | 39.8*26.1 | 35.00 |
VARS0017-090-00A | 0.170 | 0.110 | 90.0 | 11.1 | 0.11 | 18.0 | 44*39 | 70.00 |
VARS0022-032-00A | 0.220 | 0.120 | 32.0 | 15.5 | 0.16 | 21.5 | 51.5*26 | 60.00 |
VARS0042-040-00A | 0.420 | 0.380 | 40.0 | 3.5 | 0.12 | 38.0 | 53.6*30.3 | 82.00 |
VARS0077-020-00A | 0.770 | 0.630 | 20.0 | 6.7 | 0.24 | 66.0 | 50*30 | 75.00 |
VARS0084-030-00A | 0.840 | 0.600 | 30.0 | 6.3 | 0.2 | 54.2 | 48.9*30.6 | 75.00 |
VARS0120-020-00A | 1.200 | 1.200 | 20.0 | 8.4 | 0.67 | 65.0 | 73.5*32 | 80.00 |
VARS0706-014-00A | 7.100 | 2.100 | 14.0 | 52.4 | 1.03 | 220.0 | 65*54.5 | 115.00 |
VARS4520-030-00A | 45.200 | 19.000 | 30.0 | 71.5 | 4.3 | 1300.0 | 240*78 | 240.00 |