2 inch AlN Templates:
Dimensions:Ф 50.8 mm ± 0.1 mm
Substrate:Sapphire (Single Side Polished)
Thickness:4 ~ 5 µm
Orientation:C-plane (0001) ± 1°
Conduction Type:Semi-Insulating
Crystalline quality:
XRD FWHM of (0002) < 350 arcsec.
XRD FWHM of (10-12) < 450 arcsec
Edge Exclusion zone:< 2 mm
Surface Roughness:Ra < 5 nm (10 µm x 10 µm)