Main parameter index:
1. ultimate vacuum:≤6.6X10³Pa
2. vacuum acquisition system adopts molecular pump + mechanical pump unit
3. continuous pumping for 30 minutes, the vacuum degree≤86X10³Pa
4. evaporation: resistance type evaporation electrode 2 groups, evaporation power supply: 2 sets, power 2KW
The 5. substrate support: rotation, heating, water base plate
6. film thickness measurement, equipped with quartz crystal film thickness instrument, a water cooled probe