The PFA Cassette and Teflon Cassette can be customized and designed according to customers’ specifications. They are capable of withstanding strong acids, including hydrofluoric acid, strong bases, and temperatures up to 200~220℃. These cassettes are utilized for transporting wafers during acid and base processes in fabrication factories.
1. Carrying semiconductor wafers
2. Used in acid-base processes
3. The product is resistant to high temperature, strong acid, strong fluoric acid, and strong alkali
4. Can be used with additional Teflon handles
5. Laser engraving and RFID can be customized
6. Special Y-handle available as optional accessory
Material | Degree of temperature resistance | Property | Application |
PFA Cassette | 200~220℃ | Strong acid, strong hydrofluoric acid, strong base resistant | For acid& base process |
PP Cassette | 40~60℃ | Pros: Light weight, able to welding | For general transfer process |
PC Cassette | 80~100℃ | Light weight, able to welding | |
PEI Cassette | 130~150℃ | Wear resistant, anti-static |
PFA and Teflon cassettes are commonly utilized as capacitors for wafers in the semiconductor industry, offering a reliable and stable base for wafer processing. These cassettes come in various configurations and sizes to suit different applications and wafer sizes.
Aside from serving as capacitors, PFA and Teflon cassettes can also function as carriers during wafer processing, ensuring a secure and stable platform for managing wafers throughout various fabrication stages.
When working with PFA and Teflon cassettes in wafer processing, it is crucial to adhere to safety protocols. This includes wearing appropriate personal protective gear and handling the cassettes carefully to prevent any damage to the wafers or equipment.
The Wafer Cassette Box product comes with comprehensive Product Technical Support and Services to ensure smooth operation and maintenance. Our technical support team is available to assist with any product-related inquiries, troubleshooting, and guidance. Additionally, we offer various services such as installation support, maintenance plans, and product training to enhance the user experience and optimize product performance.