Zirconium Sputtering Target for Coating
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Description
FANMETAL company produces Zirconium Sputtering Target for Coating alloy sputtering targets in a variety of shapes, such as discs, rectangles, columns, steps, and custom shapes. Typical diameters for round targets are 1 inch, 2 inches, 3 inches, 4 inches or 50mm, 60mm, 80mm, 100mm, etc. Zirconium targets are in great demand, and we export a lot to other countries every year. The most commonly used are zirconium 702 targets and zirconium 705 targets. When the target core of the cylindrical planar magnetron sputtering target is designed as a rotating target core (the target core rotates during sputtering), the surface of the target can be uniformly sputtered layer by layer without pits. Zirconium ingot has high cost and purity, and is an ideal material for preparing sputtering targets. As a manufacturer of zirconium round targets, we have a large inventory of semi-finished products
Zr 702 sputtering target for coating
1:Classification:
Grade R60700 --Low oxygen zirconium
Grade R60702 --Unalloyed zirconium
Grade R60704 -- zirconium-tin
Grade R60705 --Zirconium-niobium
Grade R60706 --Zirconium-niobium
2:chemical
Chemical Requirements
Element | Grade R60700 | Grade R60702 | Grade R60704 | Grade R60705 | Grade R60706 |
Zircornium+hafnium,min | 99.2 | 99.2 | 97.5 | 95.5 | 95.5 |
Hafnium,Max | 4.5 | 4.5 | 4.5 | 4.5 | 4.5 |
Iron+chromium | 0.2 Max | 0.2 Max | 0.2 to 0.4 | 0.2 Max | 0.2 Max |
Tin | ... | 1.0 to 2.0 | 1.0 to 2.0 | .... | .... |
Hydrogen,max | 0.005 | 0.005 | 0.005 | 0.005 | 0.005 |
Carbon,max | 0.025 | 0.025 | 0.025 | 0.025 | 0.025 |
Oxygen,Max | 0.10 | 0.16 | 0.18 | 0.18 | 0.16 |
Zirconium Sputtering Target for Coating Picture:



Analysis may be required and limits established for elements and componds not specified in the table chemical composition.T
Table2 Condition of Zirconium bar
Form | Condtion |
Strip | hot rolled |
hot rolled ,annealed |
cold-rolled |
cold-rolled,annealed |
cold-rolled,annealed |
followed by a final light |
cold-rolled pass |
generally on polished roils |
|
Sheet |
hot rolled |
hot rolled ,annealed |
cold-rolled,annealed |
cold-rolled,annealed |
followed by a final light |
cold-rolled pass |
generally on polished roils |
| |
plate | hot-rolled |
hot-rolled,annealed |