Good Quality Zirconium Cathodes Planar Sputtering Targets for Coating
FANMETAL company produces Zirconium Cathodes Planar Sputtering Targets in a variety of shapes, such as discs, rectangles, columns, steps, and custom shapes. Typical diameters for round targets are 1 inch, 2 inches, 3 inches, 4 inches or 50mm, 60mm, 80mm, 100mm, etc. Zirconium targets are in great demand, and we export a lot to other countries every year. The most commonly used are zirconium 702 targets and zirconium 705 targets. When the target core of the cylindrical planar magnetron sputtering target is designed as a rotating target core (the target core rotates during sputtering), the surface of the target can be uniformly sputtered layer by layer without pits. Zirconium ingot has high cost and purity, and is an ideal material for preparing sputtering targets. As a manufacturer of zirconium round targets, we have a large inventory of semi-finished products
Specification
Composition | Zirconium Cathodes Planar Sputtering Targets |
Purity | R60702 |
Density | 6.50 g/cm3 |
Grain Sizes | 40 micon |
Fabrication Processes | Vacuum Melting, Forging, Rolling and Machining |
Shape | Planar, Step, Custom Made per drawing with holes |
Type | Monolithic |
Surface | Ra 32 micron |
1. Materials: Zirconium
2. Composition: Zr ≥ 99.5%
3. Specification(MM)
According the drawing
12X132X1701
13X132X1701
14X132X1701
According to the guest requirements, we can also provide different diameter specifications thread sizes of target material and surface.
4. APPlication: Vacuum coating, machin parts