Ion implantation source of molybdenum parts for semiconductor application

To help its customers boost productivity and encourage technological innovation, JX attaches particular importance to research and development.

The company works together closely with its customers to develop new materials and product solutions for forward-looking technologies.

As a leading enterprise in the field of powder metallurgy, JX covers the entire production process in-house – from the ore right to the customer-specific component. To do this, it presses and sinters metal powder and performs a range of deforming operations to manufacture extremely tough, reliable products.

We provides high quality, precision machined molybdenum and tungsten components for processing equipment used in the manufacture of semiconductors, including Ion Implantation, MOCVD, CVD, PVD.

Ours manufacturing experience, expertise, and knowledge of the molybdenum and tungsten materials enable us to provide precision machined components that meet your specifications.

We supply tungsten, molybdenum, titanium and advanced ceramic components and spare parts for ion implanter in OEM quality.

Our main products including cathode, arc chamber, repeller, side/end plate and fastener in ion source of axcelis and varian implanter worked in production processing of 12" and 16" wafer.

Applied Materials: 9000, 9200, 9200xR, 9500, 9500xR,

Varian Semiconductor Equipment:VIISta 3000, Genus, Kestrel, VIISta 810 XE/XER, VIISta 900 XPT, VIISion, E220, E500, VIISta 810, VIISta 810 XE, VIISta 900, VIISta 900XP, 300D, 300XP, 350D

Axcelis: GSD HC (200/200E/200E2), HC3, Ultra, Eterna, GSD 100, GSD 160A, GSD 200E, GSD 200E^2, GSD HC, GSD HC3, GSD III, GSD III LE, GSD LED, NV GSD, NV 10-160, NV 10-180, NV 10-80, Optima HD, ULE, Ultra, GSD HE, GSD VHE, GSD HE, GSD HE3, GSD VHE, Optima XE, Paradigm XE, NV 3206/3204, NV 6200, NV 8200, NV 8250, Optima MD

APPLICATIONS of Moly Ion Implanter Parts

The superiority, practicability and broad market prospects of the surface treatment technology have been recognized by more and more departments and units, and have been widely used. According to years of research and development, metal ion implantation is particularly suitable for the surface treatment of the following types of tools, molds and parts:

• The service life of metal cutting tools (including various drilling, milling, turning, grinding tools and cemented carbide tools used for precision machining and CNC machining) can generally be increased by 3-10 times;
• Hot extrusion injection mold can reduce energy consumption by about 20% and extend service life by about 10 times;
• Precision molds in the semiconductor industry, stamping and stamping dies in the can industry can significantly increase the service life of these precious precision molds;
• Moly Ion Implanter Parts Picture: